ASML spinout Invisix raises €20M to see inside the chips optics can’t

At a glance:

• ASML spinout Invisix secures €20 million seed funding to address semiconductor metrology challenges
• The startup combines high-harmonic generation with AI to enable non-destructive 3D chip inspection
• Backed by Hitachi Ventures, Transition Ventures, and an unnamed tier-1 semiconductor manufacturer

The metrology crisis

Modern chips have become too complex for traditional optical inspection tools. As semiconductor layers stack vertically and shrink below 5nm, conventional methods fail to resolve internal structures. This creates a critical yield problem - manufacturers cannot verify each manufacturing layer before proceeding, leading to costly rework. Current inspection techniques either require destructive wafer slicing or produce insufficient data, slowing production and increasing costs in a field where yield improvements translate directly to billions in revenue.

Invisix's solution

Invisix, spun out of ASML's Eindhoven research labs, has developed a novel approach using high-harmonic generation (HHG) technology. This physics breakthrough, recognized by the 2023 Nobel Prize in Physics, generates soft X-ray wavelengths through noble gas excitation. The system combines these multi-wavelength emissions with reconstruction algorithms and machine learning to create 3D images of chip layers without damaging them. This non-destructive method allows manufacturers to inspect critical features in advanced packaging and gate-all-around transistors - among the most challenging structures for existing tools.

Funding and industry validation

The seed round attracted significant institutional backing including Hitachi Ventures, Transition Ventures, and imec.xpand. Notably, the participation of an unnamed tier-1 semiconductor manufacturer signals strong industry confidence. Earlier reports indicate Samsung may be among the investors, with the company reportedly working on yield improvements for its 2nm process. This financial support will enable Invisix to expand its team, develop its first production-ready system, and conduct customer demonstrations from its new Eindhoven cleanroom facility.

Technological pedigree

The company benefits from deep technical roots within ASML's lithography division. Its team includes veterans of ASML's HHG development program and senior hires like COO Roald Dogge, formerly of contract manufacturer NTS. In 2023, Invisix publicly demonstrated its technology with Intel and imec, successfully measuring critical features in advanced transistor designs. This validation comes at a crucial time as the semiconductor industry faces increasing complexity in chip manufacturing.

Strategic importance

The investment reflects broader efforts to maintain European leadership in semiconductor technology. The Netherlands, home to ASML, has cultivated a deep-tech ecosystem including Belgian venture capital firm imec.xpand. Invisix represents one of several startups emerging from this cluster, leveraging the region's semiconductor expertise to develop next-generation manufacturing tools. The company now faces the critical challenge of transitioning from laboratory demonstrations to high-volume production systems.

Future outlook

While the technology shows promise, semiconductor tool companies must overcome significant hurdles to achieve market adoption. Invisix's path forward will require proving its system can operate reliably in high-volume manufacturing environments. The company's ability to deliver on this promise will determine whether its innovative approach becomes a standard solution for the industry's most pressing metrology challenges.